6インチN-typeウエハー

6インチN-typeウエハー仕様

Grade	Unit	Production Grade	Dummy Grade
Diameter	um	149.75±0.25	149.75±0.5
Thickness	um	350±25	350±50
Orientation	degree	4.0±0.5[11-20]
Primary Flat Orientation	degree	{10-10}± 5
Primary Flat Length	mm	47.5± 2
Micropipe Density	e.a/cm2	≦1	≦15
Resistivity	Ohm · cm	0.015~0.028	0.015~0.03
Edge Exclusion	e.a/cm2	3
LTV/TTV/Bow/Warp	um	≦2/≦5/≦25/≦40	≦5/≦15/≦40/≦60
Roughness	um	≦0.2	≦0.5
Cracks By High Intensity Light	mm	None	≦20
Hex Plates By High Intensity Light	%	Cumulative area≦0.05%	Cumulative area≦0.1%
Polytype Areas By UV lamp	um	None	Cumulative area≦3%
Visual Carbon Inclusions	%	Cumulative area≦0.05%	Cumulative area≦3%
Silicon Surface Scratches By Optical	mm	≦ 1/2 Diameter	≦ Diameter
Edge Chips By High Intensity Light	pcs	Permitted≦0.2mm width and depth	Permitted≦0.5mm width and depth
Threading Screw Dislocation	e.a/cm2	≦500	NA
Contamination By High Intensity Light	%	None	None